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PoliFab

Experimental Activities

PoliFAB, the University's infrastructure for micro and nano production, offers a single platform for integrating all of the Key Enabling Technologies in innovative devices and micro-systems.

PoliFAB also makes it possible to quickly produce prototypes and create pre-series of commercial interest.

Work is carried out in a clean room measuring 430 square metres (ISO 06 and ISO 08) set up for creating device prototypes integrating a range of technologies (photonics, micro and nano electronics, spintronics, micro mechanics/fluidics, biotechnologies).

Available processes: microfabrication on 6" (photolithography, dry and wet etching, plasma-enhanced chemical vapour depositions, sputtering, evaporation, back-end) and nanofabrication (electronic lithography, nano-imprinting, AFM nanolithography).